Thin-film lithium niobate on silicon Mach-Zehnder electrooptic modulators up to 50 GHz.
Ashutosh RaoAniket PatilPayam RabieiAmirmahdi HonardoostRichard DeSalvoArthur PaolellaSasan FathpourPublished in: OFC (2017)
Keyphrases
- thin film
- solar cell
- plasma etching
- high density
- chemical vapor deposition
- high speed
- chance discovery
- silicon nitride
- short circuit
- multi layer
- low density
- frequency band
- sigma delta
- ieee trans
- grain size
- low cost
- electric vehicles
- film thickness
- white light interferometry
- electron microscopy
- data center
- power consumption
- database systems