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Directly Deposited Thin-Film Strain Gauges on Curved Metallic Surfaces.
Rico Ottermann
Daniel Klaas
Folke Dencker
Dominik Hoheisel
Sebastian Jung
Alexander Wienke
Jan Friedrich Düsing
Jürgen Koch
Marc Christopher Wurz
Published in:
IEEE SENSORS (2021)
Keyphrases
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thin film
electron microscopy
chemical vapor deposition
film thickness
silicon nitride
curved objects
short circuit
high density
grain size
room temperature
three dimensional
multi layer
range data
white light interferometry
perspective projection
surface reconstruction
wireless sensor networks
database