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Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications.

Muneeb ZiaChaoqi ZhangParagkumar ThadesarTracy HookwayTaiyun ChiJoe L. GonzalezTodd C. McDevittHua WangMuhannad S. Bakir
Published in: BioCAS (2015)
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