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Improvement of reliability for high-ohmic Cr-Si thin film resistors in a heat and humid environment: Removing moisture source by electrocatalytic decomposition of water.

X. Y. WangQ. ChengX. P. MaH. ZhangM. X. LiT. N. ChenP. ZhangJ. Q. Shao
Published in: Microelectron. Reliab. (2016)
Keyphrases
  • thin film
  • solar cell
  • chance discovery
  • electric field
  • high density
  • multi layer
  • chemical vapor deposition
  • grain size
  • plasma etching
  • databases
  • data mining
  • mobile robot
  • short circuit
  • electron microscopy
  • global warming