Improvement of reliability for high-ohmic Cr-Si thin film resistors in a heat and humid environment: Removing moisture source by electrocatalytic decomposition of water.
X. Y. WangQ. ChengX. P. MaH. ZhangM. X. LiT. N. ChenP. ZhangJ. Q. ShaoPublished in: Microelectron. Reliab. (2016)