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Fabrication and Electrical Properties of Novel ZnTiO3/Si Capacitors with Various Zn(NO3)2 Concentrations.
Chih-Feng Yen
Shen-Hao Tsao
Yu-Ya Huang
Hung-Chang Hsu
You-Ru Zhong
Po-Chih Chen
Zhong-Wei Pan
Published in:
ICKII (2022)
Keyphrases
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electrical properties
leakage current
metal oxide
gate dielectrics
silicon nitride
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