Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning.

Koichi Sakata Hiroshi Fujimoto Atsushi Hara Kazuaki Saiki

Published in: ACC (2009)

Keyphrases

high precision
high recall
high reliability
high accuracy
computer aided
case study
design process
data sets
building blocks
real world
real time
software engineering
low cost
high speed
evolutionary algorithm
multi agent systems
decision making
software architecture
search engine
high density