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CO2 Gas Sensor Based on BaTiO3Thin Film Deposited via Ultrasonic Spray.
Mohamad Hijazi
Sandrine Bernardini
Fabien Le Pennec
Khalifa Aguir
Jean-Luc Seguin
Marc Bendahan
Published in:
IEEE SENSORS (2018)
Keyphrases
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thin film
electron microscopy
silicon nitride
chemical vapor deposition
film thickness
genetic algorithm
high density
short circuit
multi layer
solar cell
white light interferometry
learning algorithm
grain size
room temperature
big data
plasma etching
machine learning