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Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques.
Ming-Che Lin
Published in:
Comput. Math. Appl. (2014)
Keyphrases
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si sio
numerical calculation
metal oxide
three dimensional
subdivision scheme
sensitivity analysis
flow field
approximation error
error bounds
surface model
smooth surfaces
range data
approximation algorithms
numerical methods
object surface
learning phase
global illumination
closed form
vector field
neural network