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Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process.
Andreas Martin
Rolf-Peter Vollertsen
A. Mitchell
M. Traving
D. Beckmeier
H. Nielen
Published in:
Microelectron. Reliab. (2016)
Keyphrases
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high quality
integrated circuit
product quality
manufacturing process
real time
databases
massively parallel
semiconductor manufacturing
monitoring system
process control
tool wear
information retrieval
information systems
user interface
decision support
process model