D. Beckmeier

Publication Activity (10 Years)

Years Active: 2016-2018
Publications (10 Years): 3

Top Topics

Semiconductor Manufacturing

Damage Detection

Decision Support

Top Venues

Microelectron. Reliab.

Publications

D. Beckmeier, Andreas Martin
Variation-resilient quantifiable plasma process induced damage monitoring. Microelectron. Reliab. (2018)
D. Beckmeier, Andreas Martin
Plasma process induced damage detection by fast wafer level reliability monitoring for automotive applications. Microelectron. Reliab. 64 (2016)
Andreas Martin, Rolf-Peter Vollertsen, A. Mitchell, M. Traving, D. Beckmeier, H. Nielen
Fast wafer level reliability monitoring as a tool to achieve automotive quality for a wafer process. Microelectron. Reliab. 64 (2016)