ferroelectric thin films on multilayered silicon substrates.

Zheyao Wang Jianshe Liu Litian Liu

Published in: IEEE Trans. Instrum. Meas. (2006)

Keyphrases

thin film
high density
solar cell
plasma etching
chemical vapor deposition
short circuit
silicon nitride
multi layered
room temperature
grain size
field effect transistors
neural network
low density
film thickness
white light interferometry
data center
back propagation
high speed
low cost