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dielectric layer sputtered with TiN or ZrN for sandwich-like metal-insulator-metal capacitors.
P. C. Juan
K. C. Lin
H. Y. Chu
Y. C. Kuo
H. W. Wang
T. Y. Shih
Published in:
Microelectron. Reliab. (2018)
Keyphrases
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high temperature
silicon dioxide
chemical vapor deposition
space charge
metal oxide
high density
field effect transistors
data sets
decision trees
database systems