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Vapor Phase Sensing Using Metal Nanorod Thin Films Grown by Cryogenic Oblique Angle Deposition.
Piyush Shah
Dongquan Ju
Xiaoxu Niu
Andrew M. Sarangan
Published in:
J. Sensors (2013)
Keyphrases
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thin film
chemical vapor deposition
grain size
high density
silicon nitride
multi layer
short circuit
solar cell
plasma etching
sensor networks
real time
neural network
film thickness
diffusion process
laser beam
field effect transistors