Fabrication of a thin film micro polarization array.

Viktor Gruev Kejia Wu Jan Van der Spiegel Nader Engheta

Published in: ISCAS (2006)

Keyphrases

thin film
high density
plasma etching
chemical vapor deposition
low density
short circuit
grain size
multi layer
liquid crystal displays
electron microscopy
solar cell
lessons learned
room temperature
data center
integrated circuit
low cost
white light interferometry