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Gate dielectrics for Si, SiC, and GaN as synthesized by jet vapor deposition.
T. P. Ma
Published in:
Microelectron. J. (2003)
Keyphrases
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gate dielectrics
electrical properties
si sio
leakage current
structuring elements
diffusion process
flow field
flow patterns
mass transfer
film thickness
fiber optic
synthesized images
data sets
multi view
dynamic programming
fluid flow
metal oxide
genetic algorithm