Login / Signup

Conduction band states of transition metal (TM) high-k gate dielectrics as determined from X-ray absorption spectra.

Gerald LucovskyJ. G. HongC. C. FultonN. A. StouteY. ZouRobert J. NemanichD. E. AspnesH. AdeD. G. Schlom
Published in: Microelectron. Reliab. (2005)
Keyphrases