Effects of substrate temperature on electrical and structural properties of copper thin films.
Kah-Yoong ChanTeck-Yong TouBee-San TeoPublished in: Microelectron. J. (2006)
Keyphrases
- structural properties
- thin film
- film thickness
- short circuit
- room temperature
- electrical properties
- chemical vapor deposition
- high density
- tree width
- multi layer
- white light interferometry
- topological properties
- network evolution
- plasma etching
- power distribution
- grain size
- solar cell
- magnetic recording
- clustering coefficient
- low cost
- query processing
- heat flow
- silicon nitride
- database systems