Post-fabrication trimming of silicon photonic circuits by femtosecond laser pulses.
Daniel BachmanZhijiang ChenYing Y. TsuiRobert FedosejevsVien VanPublished in: OFC (2016)
Keyphrases
- high speed
- high density
- plasma etching
- cmos technology
- semiconductor devices
- silicon on insulator
- field effect transistors
- low density
- low power
- analog circuits
- logic synthesis
- low cost
- thin film
- electron beam
- laser beam
- tunnel diode
- shift register
- three dimensional
- data center
- fiber optic
- neural network
- integrated circuit
- frame rate