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Photonic integrated circuit using lanthanum-modified lead zirconate titanate thin films.
Shunsuke Abe
Shin Masuda
Koichiro Uekusa
Hideo Hara
Masao Shimizu
Published in:
OFC (2017)
Keyphrases
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integrated circuit
thin film
grain size
high density
multi layer
electron beam
short circuit
plasma etching
solar cell
chemical vapor deposition
databases
data management