A Vertical X-ray Stepper for SOR Lithography.
Sunao IshiharaAtsunobu UneMunenori KanaiMasanori SuzukiMakoto FukudaFujio OmataPublished in: J. Robotics Mechatronics (1991)
Keyphrases
- x ray
- electron beam
- electron beam lithography
- medical imaging
- x ray images
- intraoperative
- cross sections
- digital x ray images
- ct scans
- three dimensional
- tomographic images
- electron microscopy
- transmission electron microscopy
- fluoroscopic images
- projection images
- low dose
- cross sectional
- pre operative
- cone beam
- optical imaging
- electron microscope
- high resolution