Atsunobu Une

Publication Activity (10 Years)

Years Active: 1991-2023
Publications (10 Years): 2

Top Topics

Future Development

Simulation Study

Information Processing

Top Venues

Int. J. Autom. Technol.

Publications

Kenichiro Yoshitomi, Yoshinori Shimada, Atsunobu Une
Development of High-Speed Rotation Polishing System with Slurry Confinement and Friction-State Control. Int. J. Autom. Technol. 17 (1) (2023)
Kenichiro Yoshitomi, Atsunobu Une
Study of the Warp Removal Process for a Thin Substrate: Development of a Correction Processing System Using a Freezing Pin Chuck. Int. J. Autom. Technol. 14 (4) (2020)
Sunao Ishihara, Atsunobu Une, Munenori Kanai, Masanori Suzuki, Makoto Fukuda, Fujio Omata
A Vertical X-ray Stepper for SOR Lithography. J. Robotics Mechatronics 3 (4) (1991)