Thin Film PZT Multimode Resonant MEMS Temperature Sensor.
Wen SuiTahmid KaisarHaoran WangYihao WuJaesung LeeHuikai XiePhilip X.-L. FengPublished in: IEEE SENSORS (2022)
Keyphrases
- thin film
- room temperature
- chemical vapor deposition
- film thickness
- high density
- sensor data
- heat flow
- short circuit
- sensor networks
- multi layer
- solar cell
- grain size
- electron microscopy
- frequency band
- pulse width
- plasma etching
- neural network
- white light interferometry
- energy consumption
- low cost
- genetic algorithm
- machine learning