Sputtering Deposition of Lead-free Piezoelectric (K, Na)NbO3 Thin Films.
P. RatanapreechachaiI. KannoM. SatoPublished in: ICETET (2012)
Keyphrases
- thin film
- film thickness
- high density
- plasma etching
- multi layer
- short circuit
- text classification
- text categorization
- chemical vapor deposition
- grain size
- room temperature
- white light interferometry
- bayesian classifier
- solar cell
- high voltage
- bayesian classifiers
- electrical properties
- database
- magnetic field
- query processing
- machine learning
- databases