Sputtering Deposition of Lead-free Piezoelectric (K, Na)NbO3 Thin Films.

P. Ratanapreechachai I. Kanno M. Sato

Published in: ICETET (2012)

Keyphrases

thin film
film thickness
high density
plasma etching
multi layer
short circuit

text classification
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chemical vapor deposition
grain size
room temperature
white light interferometry

bayesian classifier
solar cell
high voltage
bayesian classifiers
electrical properties

database
magnetic field
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machine learning
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