Low-Temperature Wafer-Level Metal Bonding with Gold Thin Film at 100 °C.

Po-Chih Chen Demin Liu Kuan-Neng Chen

Published in: 3DIC (2019)

Keyphrases

thin film
grain size
chemical vapor deposition
high density
short circuit
neural network
genetic algorithm
silicon nitride
database
databases
simulation model
spatial distribution
electron microscopy
room temperature
solar cell