Cu pumping in TSVs: Effect of pre-CMP thermal budget.

Ingrid De Wolf Kris Croes O. Varela Pedreira Riet Labie Augusto Redolfi M. Van De Peer Kris Vanstreels C. Okoro Bart Vandevelde Eric Beyne

Published in: Microelectron. Reliab. (2011)

Keyphrases