Enhanced Threshold Voltage Stability in ZnO Thin-Film-Transistors by Excess of Oxygen in Atomic Layer Deposited Al2O3.
Rodolfo A. Rodriguez-DavilaRichard A. ChapmanMassimo CatalanoManuel Quevedo-LopezChadwin D. YoungPublished in: IRPS (2020)
Keyphrases
- thin film
- high density
- electron microscopy
- multi layer
- chemical vapor deposition
- silicon nitride
- film thickness
- voltage stability
- power system
- reactive power
- short circuit
- solar cell
- white light interferometry
- fuzzy neural network
- neural nets
- data center
- computational intelligence
- decision making
- artificial intelligence