Principal component based k-nearest-neighbor rule for semiconductor process fault detection.
Q. Peter HeJin WangPublished in: ACC (2008)
Keyphrases
- expert systems
- k nearest neighbor
- fault detection
- fault diagnosis
- knn
- industrial processes
- nearest neighbor
- fuzzy logic
- power plant
- fault identification
- nearest neighbour
- condition monitoring
- fault detection and diagnosis
- support vector machine
- classification algorithm
- classification method
- k nearest neighbour
- knn algorithm
- knn classifier
- robust fault detection
- feature selection
- databases
- distance function
- information extraction
- graph construction
- decision making
- learning algorithm
- genetic algorithm
- neural network
- data sets