Silicon Torsional Scanning Mirror.

Kurt E. Petersen

Published in: IBM J. Res. Dev. (1980)

Keyphrases

low cost
high density
scan data
high speed
image processing
structured light
liquid crystal
omni directional
real time
field of view
finite element model
numerical simulations
gallium arsenide
plasma etching
transmission electron microscopy
single image
d objects
viewpoint
learning algorithm
data mining
data sets