Kurt E. Petersen

Publication Activity (10 Years)

Years Active: 1980-1998
Publications (10 Years): 0

Publications

Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen
Bulk micromachining of silicon. Proc. IEEE 86 (8) (1998)
Kurt E. Petersen
Silicon Torsional Scanning Mirror. IBM J. Res. Dev. 24 (5) (1980)