Hybrid Integrated Photonic Devices based on Silicon and Thin Film Lithium Niobate.

Published in: OECC/PSC (2022)

Keyphrases

thin film
solar cell
high density
plasma etching
chemical vapor deposition
chance discovery
multi layer
silicon nitride
mobile devices
short circuit
grain size
electron microscopy
room temperature
low density
data center
low cost
database
back propagation
high speed
neural network