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Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures.
Rico Ottermann
Daniel Klaas
Folke Dencker
Marc Christopher Wurz
Dominik Hoheisel
Peter Rottengatter
Thomas Kruspe
Published in:
IEEE SENSORS (2020)
Keyphrases
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thin film
high density
multi layer
solar cell
short circuit
plasma etching
chemical vapor deposition
electron microscopy
grain size
film thickness
data streams
neural network
machine learning
low cost
low density
white light interferometry