Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine.
S. KalaiselviL. SujathaR. SundarPublished in: IEEE SENSORS (2018)
Keyphrases
- gas turbine
- fault diagnosis
- fault tree
- high density
- operating conditions
- fault detection
- expert systems
- integrated circuit
- neural network
- gesture recognition
- fuzzy logic
- high speed
- sensor networks
- simulation model
- activity recognition
- condition monitoring
- power plant
- daily activities
- electron beam
- liquid crystal displays