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Micro Fabrication Technique for Three-dimensional Structures based on Localized Electrophoretic Deposition using a Scanning Ion Conductance Microscope.
Masayoshi Yoshioka
Futoshi Iwata
Published in:
MHS (2018)
Keyphrases
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electrical properties
plasma etching
thin film
high density
low density
integrated circuit
visual inspection
image processing
electro mechanical systems
scan data
structured light
thin film transistor
chemical vapor deposition
high speed
neural network
film thickness
database