Yan-Lei Wang

Publication Activity (10 Years)

Years Active: 2013-2013
Publications (10 Years): 0

Top Topics

Mechanical Properties

Silicon Dioxide

Optimization Methods

Top Venues

Microelectron. Reliab.

Publications

Yun-An Zhang, Jun-Yong Tao, Yan-Lei Wang, Zhi-Qian Ren, Bin Liu, Xun Chen
The effect of water on the mechanical properties of native oxide coated silicon structure in MEMS. Microelectron. Reliab. 53 (9-11) (2013)
Jun-Yong Tao, Xiao-Jing Wang, Bin Liu, Yan-Lei Wang, Zhi-Qian Ren, Xun Chen
Improved bending fatigue life of single crystal silicon micro-beam by phosphorus doping. Microelectron. Reliab. 53 (9-11) (2013)