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The effect of water on the mechanical properties of native oxide coated silicon structure in MEMS.

Yun-An ZhangJun-Yong TaoYan-Lei WangZhi-Qian RenBin LiuXun Chen
Published in: Microelectron. Reliab. (2013)
Keyphrases
  • mechanical properties
  • silicon dioxide
  • high speed
  • composite materials
  • edge detection
  • x ray
  • theoretical analysis
  • optimization methods
  • man made