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Xinchun Lu
ORCID
Publication Activity (10 Years)
Years Active: 2013-2023
Publications (10 Years): 2
Top Topics
Eddy Current
Top Venues
IEEE Trans. Instrum. Meas.
IEEE Trans. Ind. Electron.
Microelectron. Reliab.
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Publications
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Chengxin Wang
,
Tongqing Wang
,
Bangxu Liu
,
Fangxin Tian
,
Xinchun Lu
Metal Thickness Measurement System Based on a Double-Coil Eddy-Current Method With Characteristic Ratio Detection.
IEEE Trans. Ind. Electron.
70 (12) (2023)
Chengxin Wang
,
Tongqing Wang
,
Fangxin Tian
,
Xinchun Lu
Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing.
IEEE Trans. Instrum. Meas.
71 (2022)
Chenglong Liao
,
Dan Guo
,
Shizhu Wen
,
Xinchun Lu
,
Jianbin Luo
Stress analysis of Cu/low-k interconnect structure during whole Cu-CMP process using finite element method.
Microelectron. Reliab.
53 (5) (2013)