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Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing.
Chengxin Wang
Tongqing Wang
Fangxin Tian
Xinchun Lu
Published in:
IEEE Trans. Instrum. Meas. (2022)
Keyphrases
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eddy current
magnetic field
data acquisition
sensor networks
sensor data
multi sensor
real time
fiber bragg grating
data sets
image processing
image sensor
measurement model
contact force
mechanical design
sensor array