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Teruaki Safu
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 3
Top Topics
Neural Nets
Fuzzy Logic
Geometric Structure
Multi Layer
Top Venues
Microelectron. Reliab.
NEMS
IEEE SENSORS
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Publications
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Toshifumi Konishi
,
Teruaki Safu
,
Katsuyuki Machida
,
Daisuke Yamane
,
Masato Sone
,
Kazuya Masu
,
Hiroshi Toshiyoshi
A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.
IEEE SENSORS
(2016)
Daisuke Yamane
,
Toshifumi Konishi
,
Teruaki Safu
,
Hiroshi Toshiyoshi
,
Masato Sone
,
Kazuya Masu
,
Katsuyuki Machida
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology.
NEMS
(2016)
Daisuke Yamane
,
Toshifumi Konishi
,
Teruaki Safu
,
Hiroshi Toshiyoshi
,
Masato Sone
,
Kazuya Masu
,
Katsuyuki Machida
Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer.
Microelectron. Reliab.
66 (2016)