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A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.
Toshifumi Konishi
Teruaki Safu
Katsuyuki Machida
Daisuke Yamane
Masato Sone
Kazuya Masu
Hiroshi Toshiyoshi
Published in:
IEEE SENSORS (2016)
Keyphrases
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multi layer
neural network
artificial neural networks
fuzzy logic