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A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.

Toshifumi KonishiTeruaki SafuKatsuyuki MachidaDaisuke YamaneMasato SoneKazuya MasuHiroshi Toshiyoshi
Published in: IEEE SENSORS (2016)
Keyphrases
  • multi layer
  • neural network
  • artificial neural networks
  • fuzzy logic