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Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer.

Daisuke YamaneToshifumi KonishiTeruaki SafuHiroshi ToshiyoshiMasato SoneKazuya MasuKatsuyuki Machida
Published in: Microelectron. Reliab. (2016)
Keyphrases
  • geometric structure
  • neural network
  • hidden markov models
  • multi layer
  • bayesian networks
  • data structure
  • bit rate
  • information security
  • gold standard