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A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology.
Daisuke Yamane
Toshifumi Konishi
Teruaki Safu
Hiroshi Toshiyoshi
Masato Sone
Kazuya Masu
Katsuyuki Machida
Published in:
NEMS (2016)
Keyphrases
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multi layer
case study
neural network
artificial intelligence
decision making
training data
image classification
design process
neural nets
multiple layers
error back propagation