Tatsushi Yagi

Publication Activity (10 Years)

Years Active: 2021-2021
Publications (10 Years): 1

Top Topics

Gate Dielectrics

Leakage Current

Top Venues

Publications

Shuntaro Fujii, Shohei Hamada, Tatsushi Yagi, Isao Maru, Shogo Katsuki, Toshiro Sakamoto, Atsushi Okamoto, Soichi Morita, Tsutomu Miyazaki
Impacts of Depth and Lateral Profiles of Fluorine Atoms in Gate Oxide Films on Reliability. IRPS (2021)