Sebastien Rigo

Publication Activity (10 Years)

Years Active: 2001-2003
Publications (10 Years): 0

Publications

Xavier Lafontan, Francis Pressecq, Felix Beaudoin, Sebastien Rigo, M. Dardalhon, J.-L. Roux, Petra Schmitt, J. Kuchenbecker, B. Baradat, Djemel Lellouchi
The advent of MEMS in space. Microelectron. Reliab. 43 (7) (2003)
Sebastien Rigo, Phillippe Goudeau, Jean-Michel Desmarres, Talal Masri, Jacques-Alain Petit, Petra Schmitt
Correlation between X-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS. Microelectron. Reliab. 43 (9-11) (2003)
Felix Beaudoin, Philippe Perdu, Romain Desplats, Sebastien Rigo, Dean Lewis
Silicon Thinning and Polishing on Packaged Devices. Microelectron. Reliab. 41 (9-10) (2001)