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P. Scheer
Publication Activity (10 Years)
Years Active: 2013-2013
Publications (10 Years): 0
Top Topics
Integrated Circuit
Rf Sputtering
Electron Beam
Top Venues
3DIC
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Publications
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Melanie Brocard
,
Cédric Bermond
,
Thierry Lacrevaz
,
Alexis Farcy
,
Patrick Le Maitre
,
P. Scheer
,
Patrick Leduc
,
Séverine Cheramy
,
Bernard Fléchet
RF characterization of substrate coupling between TSV and MOS transistors in 3D integrated circuits.
3DIC
(2013)