Marcos Massi

Publication Activity (10 Years)

Years Active: 2003-2017
Publications (10 Years): 1

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Top Venues

Publications

Luiz Antonio Rasia, Gabriela Leal, Leandro Léo Koberstein, Humber Furlan, Marcos Massi, Mariana Amorim Fraga
Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor. WEA (2017)
M. Guerino, Marcos Massi, Ronaldo Domingues Mansano
The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films. Microelectron. J. 38 (8-9) (2007)
Marcos Massi, J. M. J. Ocampo, H. S. Maciel, K. Grigorov, C. Otani, L. V. Santos, Ronaldo Domingues Mansano
Plasma etching of DLC films for microfluidic channels. Microelectron. J. 34 (5-8) (2003)
M. Guerino, Marcos Massi, H. S. Maciel, C. Otani, Ronaldo Domingues Mansano
The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films. Microelectron. J. 34 (5-8) (2003)
Ana Paula Mousinho, Ronaldo Domingues Mansano, Marcos Massi, Luís da Silva Zambom
High density plasma chemical vapor deposition of diamond-like carbon films. Microelectron. J. 34 (5-8) (2003)