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M. Guerino
Publication Activity (10 Years)
Years Active: 2003-2007
Publications (10 Years): 0
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Publications
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M. Guerino
,
Marcos Massi
,
Ronaldo Domingues Mansano
The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films.
Microelectron. J.
38 (8-9) (2007)
M. Guerino
,
Marcos Massi
,
H. S. Maciel
,
C. Otani
,
Ronaldo Domingues Mansano
The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films.
Microelectron. J.
34 (5-8) (2003)