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Plasma etching of DLC films for microfluidic channels.
Marcos Massi
J. M. J. Ocampo
H. S. Maciel
K. Grigorov
C. Otani
L. V. Santos
Ronaldo Domingues Mansano
Published in:
Microelectron. J. (2003)
Keyphrases
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plasma etching
thin film
low density
high density
multi channel
communication channels
real world
mimo systems
website
hidden markov models
chemical vapor deposition
database
information systems
artificial intelligence
machine learning
data mining
neural network
databases