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High density plasma chemical vapor deposition of diamond-like carbon films.
Ana Paula Mousinho
Ronaldo Domingues Mansano
Marcos Massi
Luís da Silva Zambom
Published in:
Microelectron. J. (2003)
Keyphrases
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chemical vapor deposition
high density
thin film
data center
carbon dioxide
low density
close proximity
high power
magnetic recording
plasma etching
data mining
magnetic tape
high bandwidth
database
distributed systems
general purpose
databases