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Jian Yang
ORCID
Publication Activity (10 Years)
Years Active: 2015-2019
Publications (10 Years): 3
Top Topics
Chemical Vapor Deposition
High Density
Thin Film
Multi Layer
Top Venues
Micromachines
Sensors
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Publications
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Meng Zhang
,
Jian Yang
,
Yurong He
,
Fan Yang
,
Fuhua Yang
,
Guowei Han
,
Chaowei Si
,
Jin Ning
Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.
Sensors
19 (1) (2019)
Jian Yang
,
Chaowei Si
,
Guowei Han
,
Meng Zhang
,
Liuhong Ma
,
Yongmei Zhao
,
Jin Ning
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators.
Micromachines
6 (2) (2015)
Meng Zhang
,
Jian Yang
,
Chaowei Si
,
Guowei Han
,
Yongmei Zhao
,
Jin Ning
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications.
Micromachines
6 (9) (2015)