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Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications.

Meng ZhangJian YangChaowei SiGuowei HanYongmei ZhaoJin Ning
Published in: Micromachines (2015)
Keyphrases
  • thin film
  • multi layer
  • high density
  • grain size
  • chemical vapor deposition
  • short circuit